Example 2‐D Micro‐Machined Whole‐Angle Gyroscopes

This chapter reviews two examples of 2‐D micro‐machined whole‐angle gyroscope architectures in order to illustrate factors that influence design decisions, fabrication considerations, and characterization methodology. The examples are Toroidal Ring Gyroscope (TRG) and Dual Foucault Pendulum (DFP) gyroscope. TRG belongs to the family of concentric ring gyroscopes. The gyroscopes that belong to this family utilize multiple concentric rings that are connected by spokes for their vibratory element. One of the earliest examples of concentric ring gyroscopes is Disk Resonator Gyroscope, which utilizes a central anchor structure and multiple concentric rings around the central anchor structure for its vibratory element. DFP belongs to the family of lumped mass gyroscope architectures and consists of two dynamically equivalent, mechanically coupled proof masses, oscillating in the anti‐phase motion. This dual axis tuning fork behavior creates a dynamically balanced resonator with x–y symmetry in frequency and damping, suitable for the whole‐angle mechanization.