CMOS Terahertz Sensor

Recently, a great deal of attention has been paid to the terahertz (THz) spectroscopy and imaging system due to the moderate wavelength of THz wave that can leverage the advantages of both millimeter‐waves and light waves. This chapter shows that a high reflection coefficient of differential T‐line (DTL)‐split ring resonator (SRR) can be directly transferred into a high Q. It presents DTL‐SRR resonator with the standing‐wave resonator and compares the same using a coplanar stripline (CPS). Cell testing has attracted intensive attention recently due to the need for early detection of diseases such as cancer. The chapter investigates split‐ring resonator (SRR)‐based plasmonic sensors with layout designs in the standard 65‐nm complimentary metal‐oxide semiconductor (CMOS) process at sub‐THz. Two super‐regenerative receivers (SRX) working at 96 GHz and 135 GHz are implemented into the CMOS process to demonstrate the advantages of applying quench‐controlled oscillators with metamaterial resonators in SRX.