Section 4: Electrostatic Actuators

This chapter contains sections titled:

• The Principle of an Electrostatic Linear Actuator Manufactured by Silicon Micromachining

• Design Considerations for a Practical Electrostatic Micro-Motor

• SCOFSS: A Small Cantilevered Optical Fiber Servo System

• Microactuators for Aligning Optical Fibers

• Large Displacement Linear Actuator

• Multi-Layered Electrostatic Film Actuator

• Movable Micromachined Silicon Plates With Integrated Position Sensing

• Micro Electro Static Actuator With Three Degrees of Freedom

• The Modelling of Electrostatic Forces in Small Electrostatic Actuators

• Silicon Electrostatic Motors

• Electrostatic Actuators for Micromechatronics

• Electric Micromotors: Electromechanical Characteristics

• Electroquasistatic Induction Micromotors

• A Perturbation Method for Calculating the Capacitance of Electrostatic Motors