Microelectromechanical Switches for RF Applications

There are a number of ways to classify various switch architectures. The classification followed in this chapter places switches in three main groups: fixed-fixed beam switches, cantilever beam switches, and compliant beam switches. Each of the above architectures satisfies specific requirements related to the type of switch, series versus shunt, the type of contact, metal-to-metal versus capacitive, and the actuation voltage required for the switch operation. A discussion on switch characteristics in each of the above groups is provided in detail.