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Statistical Performance Modeling and Optimization reviews various statistical methodologies that have been recently developed to model, analyze and optimize performance variations at both transistor level and system level in integrated circuit (IC) design. The following topics are discussed in detail: sources of process variations, variation characterization and modeling, Monte Carlo analysis, response surface modeling, statistical timing and leakage analysis, probability distribution extraction, parametric yield estimation and robust IC optimization. These techniques provide the necessary CAD infrastructure that facilitates the bold move from deterministic, corner-based IC design toward statistical and probabilistic design. Statistical Performance Modeling and Optimization reviews and compares different statistical IC analysis and optimization techniques, and analyzes their trade-offs for practical industrial applications. It serves as a valuable reference for researchers, students a d CAD practitioners.