Integrated vertical-cavity laser diodes and resonant photodetectors with hybrid Si/sub 3/N/sub 4//SiO/sub 2/ top Bragg mirrors

An attractive feature of vertical-cavity surface emitting lasers (VCSEL) is that they readily lend themselves to integration with other optoelectronic components, thus including a greater functionality on the chip and opening new fields of applications. We present a technology to integrate VCSEL and resonance-enhanced photodetectors (REPD) in the top-emitting geometry, utilizing Si/sub 3/N/sub 4//SiO/sub 2/ top Bragg mirrors. This technique allows one to tune the detector's optical bandwidth in a wide range without affecting the laser performance. The results are compared to numerical simulations.