Novel methodology to include all measured extension values per defect to improve defect size distributions

Defect size distributions play an important role in process characterization and yield prediction. In order to reduce time and costs of defect size extraction procedures, the paper presents a novel methodology to determine defect size distributions. For that, we use all measured defect extension values per inspected defect, as compared to known methodologies which use just one size value per defect. Our approach enables reduction of the sample of defects to be inspected in semiconductor manufacturing fabs. Nevertheless, the novel methodology provides even better defect size distribution accuracy.