Automatic synthesis of equipment recipes from specified wafer-state transitions

Run-to-run and supervisory control algorithms determine the equipment recipe to produce a desired output wafer state given the Incoming wafer state and the current equipment model. For linear or univariate non-linear equipment models, this problem is trivial. However, when there are multiple responses for the system and the equipment models are nonlinear, the automated synthesis of recipes is complicated by the potential for multiple solutions. We present a framework for performing automated synthesis of recipes that imposes quasi-continuity on the extracted recipes, is scalable to systems of high dimensionality, and performs very quickly. The framework relies on a hierarchical approach that uses pre-determined starting points and local optimisation to determine the best recipe for a given wafer-state transition. A test implementation of this system has shown very good performance.