Shock sensors using direct bonding of LiNbO/sub 3/ crystals

We have developed a shock sensor made with a bimorph type cantilever using by a technique of directly bonding piezoelectric single crystals. The cantilever's polarization-inverted structure was achieved by directly bonding LiNbO/sub 3/ single-crystal wafers having reverse polarization. This technique did not require any bonding agent. The basic characteristics of the shock sensor were evaluated. The resonance frequency of the cantilever having a length of 2 mm was 20 kHz. The sensor made from 140/spl deg/ rotated Y cut LiNbO/sub 3/ wafers had a high sensitivity of 6.4 mV/G, and excellent linearity.