MM-wave tapered slot antennas on micromachined photonic bandgap dielectrics

Dramatic improvements in the radiation properties of tapered slot antennas (TSA) integrated on high dielectric constant substrates have been achieved through micromachining techniques. A periodic hole structure was micromachined into the substrate converting it into a photonic bandgap material. The measured directivity of a 4/spl lambda//sub 0/ TSA on a 50 mil (1.27 mm) thick Duroid substrate (/spl epsiv//sub r/=10.5) was increased by 240% using micromachined holes with a hexagonal geometry. A similar improvement was observed when the process was performed at 30 GHz on a 14 mil (350 /spl mu/m) silicon wafer. We believe the technology can be scaled to 60 GHz and 94 GHz for communication systems, low-cost millimeter wave imaging arrays, and power combining systems.