Simulating micro-electromechanical systems

Modelling micro-electromechanical devices with a system of algebraic and nonlinear (partial) differential equations, as opposed to ordinary differential equations, simplifies the simulation process and eliminates simulator coupling problems. In this article, we automate the modeling of mechanical parts with electronic devices using MeXeL, which translates the system of equations to Spice3-netlists. In this way, difficulties caused by coupling different simulators are eliminated. Here, we show the suitability of such a method by dynamically simulating a deformable mirror device (DMD) and its controlling circuit.<
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