High temperature superconducting oxide films

The authors used sputter deposition with single oxide targets and metal molecular beam epitaxy to prepare thin films of the high-T/sub c/ oxide Y-Ba-Cu-O superconductor. The processing parameters, the structural characteristics, and the transport properties of the films are reported. The authors also discuss the microstructures of superconducting Y/sub 1/-Ba/sub 2/Cu/sub 3/O/sub 7/ thin films epitaxially grown on SrTiO/sub 3/