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A convex optimization-based nonlinear filtering algorithm with applications to real-time sensing for patterned wafers

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2 Author(s)
Ji-Woong Lee ; Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA ; Khargonekar, P.P.

The paper is concerned with nonlinear filtering under unknown dynamics and high-complexity observations. We propose a convex optimization-based filtering algorithm, and show that the algorithm yields a bounded error if the disturbances are small and bounded, and if the observations are redundant. An experimental result is presented to demonstrate that the algorithm is capable of accurate real-time estimation of patterned wafer parameters in a plasma etching process with optical observation.

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Automatic Control, IEEE Transactions on  (Volume:48 ,  Issue: 2 )