Design and modeling of polarization-stable surface-etched VCSELs

We have successfully fabricated and modeled elliptically surface-etched oxide confined VCSELs for high single-mode polarization-stable operation. From our results, the two possible polarization directions seem to be determined by anisotropies in the oxidation process but can be selected by the orientation of the etched ellipse. Investigations with different mirror reflectivities and more finely varied ellipse shapes will lead to design rules for optimum performance.