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Self-Aligned Single Diffusion Break Technology Optimization Through Material Engineering for Advanced CMOS Nodes | IEEE Conference Publication | IEEE Xplore

Self-Aligned Single Diffusion Break Technology Optimization Through Material Engineering for Advanced CMOS Nodes


Abstract:

Though single diffusion break (SDB) acts as an efficient area-scaling enabler for current CMOS technology nodes, it degrades devices' variability performance, which can b...Show More

Abstract:

Though single diffusion break (SDB) acts as an efficient area-scaling enabler for current CMOS technology nodes, it degrades devices' variability performance, which can be mitigated by enabling self-aligned SDB (SA-SDB) technology. Unfortunately, SA-SDB causes PMOS performance degradation due to channel stress relaxation. To solve this issue, we propose material engineering of SA-SDB technology to improve PMOS performance. Using 3D-TCAD simulations, we show that by using stressed oxide for the SA-SDB cavity fill, both PMOS and NMOS device performance can be improved. Furthermore, using ring-oscillator as a representative circuit for CMOS technology evaluation, we showed that the circuit performance can be improved by 13-21% for 2-3 GPa stress in the oxide, thus enabling simultaneous area-scaling and circuit and variability performance improvement with SA-SDB technology for advanced CMOS nodes.
Date of Conference: 23 September 2020 - 06 October 2020
Date Added to IEEE Xplore: 02 November 2020
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Conference Location: Kobe, Japan

References

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