Compact High-Precision Analog Temperature Controller for MEMS Inertial Sensors

In this paper, we present an analog high-precision temperature controller designed to stabilize the temperature of MEMS inertial sensors with a short-term stability of better than ±50 μ
^°
K and long-term stability of ±250 μ
^°
Kp-p measured over 12 hours. The fully analog design employing only DC signals makes it suitable for noise and interference sensitive applications as compared to AC coupled and digital methods. A linear power management method also has been implemented to minimize the power dissipation on the power stage to less than 5 mW. The whole controller implemented on a 21.3 mm×21.3 mm 10.84
^''
×0.84
^''
) PCB.