Optimized Design of Three-Port Microwave Plasma Reactor Based on Phase Control

Microwave plasma has a wide range of application value due to its high electron density and power efficiency, while its efficient utilization depends on the design and research of reactors. Aiming at the problem of inhomogeneity and instability of traditional reactor plasma, a three-port microwave plasma reactor is innovatively designed in this paper. By introducing the compressed waveguide structure and the three-port symmetrical design, the superposition and enhancement of the electric field are realized. Combined with multi-physics calculations, the internal field strength and distribution of the cavity are analyzed, and the reactor structure is optimized. The results show that changing the port phase significantly affects the superposition and distribution of the electric field, and the peak field strength after adjusting the phase reaches $1.6 \times 10^{5} ~\mathrm{V} / \mathrm{m}$, with the average value exceeding $6 \times 10^{4} ~\mathrm{V} / \mathrm{m}$, which satisfies the conditions of plasma excitation and stabilization, thus laying a foundation for the subsequent research.