12-GHz Spurious-Free Fin-Mounted Lamb Wave Resonator with Half-Electrode Reflectors

In this work, we propose a fin-mounted Lamb wave resonator design with half-electrode reflectors to achieve spurious mode suppression and quality factor enhancement at 12 GHz using Z-cut LiNbO3. Half-electrode reflectors and fin anchors are designed at both two sides of the resonator to effectively confine the acoustic energy. The fabricated spurious-free A1-mode resonator with half-electrode reflectors achieves coupling coefficient (k2) of 18.3%, parallel quality factor (Qp) of 1742, and Figure of Merit (FoM) of 319 at 11.7 GHz, demonstrating great potential of Lamb wave devices for next-generation wireless communications.