Process Development, Microstructure and Electrical Resistance on Green Laser Induced Graphene from Polyimide

Laser induced graphene (LIG) on polyimide is a promising technique for the fabrication of flexible electronic devices. In this study, the laser parameters for LIG on polyimide was optimized to achieve high quality and reproducible graphene patterns. The electrical resistance of the LIG patterns as a function of laser processing parameters was investigated and it was found that the resistance decreased with increasing laser energy density. Microstructure analysis revealed that the LIG patterns were composed of graphene with both micro-sized and nano-sized porous structures. Raman spectroscopy confirmed the formation of graphene with the characteristic of high G/D ratio and 2D peaks at 2700 cm⁻¹. Our findings suggest that LIG on polyimide is a promising method for the fabrication of flexible electronic devices, and that careful optimization of the laser parameters is essential for achieving high quality and reproducible graphene patterns.