Design and Research of SIW Wireless Passive High-Temperature and Pressure Sensor

Currently, it is difficult to measure the temperature and pressure of critical components in real time in aerospace and industrial fields. So, a novel high-temperature and pressure sensor was designed to solve the problem. The microwave backscatter technology and combining the theory of substrate integrated waveguide (SIW) and slot antenna were exploited to design the sensor, which not only realized wireless passive measurement but also had the characteristics of miniaturization and could effectively avoid the problems caused by wired active. Using silicon carbide ceramic as the substrate of the sensor can resist extremely high temperatures and pressures. The completed high-temperature and pressure sensor has been experimentally tested to achieve simultaneous temperature and pressure measurements at 1000 °C and 700 kPa. Moreover, the sensor contains a temperature-sensitive unit and a temperature–pressure-sensitive unit, which can avoid the parameter crosstalk problem after data processing. This study not only proposes a new type of wireless passive high-temperature and pressure sensor but also provides a potential way for the development of wireless passive multiparameter sensors.