Multi-Mode Silicon Waveguides at Long Infrared Wavelengths

As part of a future optical platform, an on-chip multi-mode silicon waveguide for the long infrared wavelength range is designed, fabricated and investigated. The waveguide is coupled to a laser source and a detector using optical fibers together with optical couplers on the chip. In the range 9 μm to 9.4 μm a propagation loss of 18.7 dB/cm of the waveguide was measured.