Design optimization of beam-like ferroelectrics-silicon microphone and microspeaker

Design optimization of beam-like ferroelectrics-silicon integrated microphone and microspeaker is studied. The Pt/Pb(Zr,Ti)O/sub 3//Pt/SiO/sub 2//Si/sub 3/N/sub 4/ cantilever structure is designed theoretically using multimorph model. The sensitivity and the sound pressure level (SPL) of the integrated microphone and microspeaker are calculated. It is found that the sensitivity of the microphone and the SPL of the microspeaker are very high. This integrated microphone and microspeaker will be valuable for high quality micro-acoustic devices.