Tunable thermo-optic filter for WDM applications

In this paper we present a novel MEMS-based concept for tunable optical filters for use in wavelength-division multiplexing (WDM) systems. Such a filter is essential for monitoring and reconfiguration of optical networks. Our device is based on a Fabry-Perot interferometer employing a silicon cavity and silicon-based dielectric Bragg mirrors. It is fabricated as a free-standing membrane. Wavelength tuning is achieved through thermal modulation of the resonator's optical thickness. We present the measurement of optical filter performance and tunability. Numerical simulation results of its steady-state and transient thermal behavior are also given.