Numerical Analysis of ECR Plasma Source

Gases ionizers usage ECR (Electron Cyclotron Resonance) is one of the methods for creating two temperature plasma. Thanks to high efficiency is this method suitable for wide spectrum of applications. Especially for the systems which are sensitives on high power electrical noise, cooling is problematic for them or they have limited power supplier (electron microscopy, plasma actuators, etc.). The main disadvantage of ECR plasma sources is complicated design compared to the other ionisation techniques. The crucial is tune of the magnetostatics and high frequency fields in active area of the source. Working frequency also plays an important role and even electric and magnetic field ratio. This paper describes how to calculate electric and magnetic fields inside ECR plasma sources and how to enable tune and optimization of these sources. Paper also shows how to make visualisation of the active ECR surfaces and thereby deepening the understanding of how the sources works.