Quartz angular rate sensor for automotive control

A new quartz angular rate sensor has been developed for automotive controls. The principle of the sensor is detection of the Coriolis force with a vibrator An H shape vibrator supported with a stein at the center was used The vibrator supported at the center was good for the isolation of a small motion detecting angular rate from an extremely large excitation motion. A new mechanical coupling model and the FEM analysis were used to reduce output offset of the sensor. The detection range of the sensor is from -100 deg/s to 100 deg/s. The sensor output offset is small within /spl plusmn/ l deg/s. The developed quartz sensor satisfied required specifications and had wide temperature reliability. Further, the sensor has been successfully used onboard passenger cars.