A moment method analysis of SAW interaction in periodic metal-semiconductor structure

In this paper, the moment method technique is formulated to carry out a full wave analysis of a periodic metal strip on thin film semiconductor. A number of basis and testing functions verifying the electric field boundary conditions are assumed for the solution. The solution gives the electric field distribution as well as the potential and charge distribution. The surface impedance can be calculated using the relation of potential and charge density. The impedance calculations lead to transmission line structure applications as well as interaction with surface acoustic waves. The influence of surface impedance on the propagation characteristics of Rayleigh mode surface acoustic waves is presented. A small number of basis functions (nx=4), which reduce computational time, give good results. Our results agree very well with Green's function data.