Ultrafast laser micromachining of x-ray gratings and sub-micron hole patterns with differents beam shapes

Grating interferometry (GI) [1] - [3] is a novel imaging technique that has the potential to revolutionize medical imaging. While GI method was extensively developed in the last decade, the bottleneck for implementation of the method into real world clinics remains reliable production of gratings and their high cost of production. With laser micromachining, we aim to develop reliable gratings fabrication method with large area scalability and cost reduction perspectives. Recently, Bessel beam formation with axicon lenses has demonstrated possibility to form structures with lasers in sub-micron width range down to 230 nm and large depth up to 10 μm (high aspect ratio up to 40) [4] - [6] .