Sensing with Serial or Parallel Micromechanical Resonators

The mass-spring-damper resonator is the basic mechanical component of current microelectromechanical systems (MEMS) sensors. It is implemented in different forms such as beams, diaphragms, rings, etc. The amplitude, frequency, or phase change of the resonator is typically used to perform sensing applications. This paper presents the basic theories, challenges, and applications for serial and parallel connections of micromechanical resonators for high-accuracy sensing. It provides a new solution to improve the accuracy of MEMS sensors based on current MEMS process capabilities.