Integration of Radar Cross Section Reducing Metasurfaces into Mesoscopic Micromirror Arrays for Terahertz Spatial Light Modulation

We report the conception, fabrication and characterization of a radar cross section reducing (RCSR) metasurface and its integration into a mesoscopic micromirror-array for terahertz spatial light modulation. The metasurface reduces the specular reflection of terahertz waves. Covering the metasurface with an electrically reconfigurable micromirror-array enables the implementation of a micro-opto-electromechanical THZ-SLM with an average modulation contrast of 81% in the frequency range from 0.88 THz to 1.83 THz and a maximum contrast of 93% at 1.29 THz.