Long throw and i-PVD liners for W-plug contact and via applications

Results are presented for long throw and ionized PVD layers for W-plug liner applications. 245 mm and 430 mm long throw modules are discussed, the latter being shown to be applicable to sub-0.17 /spl mu/m contacts when combined with very low process pressures. Data is presented showing that stable contacts can be produced without the damage risks associated with high energy ionized PVD processes. For metal applications above contact, a novel PVD module is shown to have particular benefits at via level. Chain data is presented showing >15% reduction in via resistance compared to any combination of i-PVD/long throw Ti/TiN sequences.