Compact 3D profilometer with grazing incidence diffraction optics

A new configuration of diffraction range finder is disclosed that places the grating at an angle of grazing incidence relative to the lens and transducer in the receiver. The new design offers improvements over an earlier prototype in reduced package size, shorter grating frequency chirp, and anamorphic behavior that increases length to depth ratios in profilometry applications. Demonstrations with transmission and reflection types of diffraction grating corroborate predictions.