Frequency Effect on Structure and Properties of Optical Zr-B-N Films Obtained by Pulsed Magnetron Sputtering (PMS) Technology

Optical Zr-B-N films deposited by pulsed magnetron sputtering (PMS) at various frequencies are studied. A ceramic ZrB2 target obtained by self-propagating high-temperature synthesis is used for sputtering. It is shown that the increasing the frequency improves mechanical properties, including hardness and elastic recovery. All types of films exhibit a high transparent coefficient in the wavelength range of 350-950 nm.