Accurate and robust noise-based trigger algorithm for soft breakdown detection in ultra thin oxides

Oxide breakdown is one of the most threatening failure mechanisms in integrated circuits. As the oxide thickness is decreased in the sub-5 nm range, the breakdown definition itself is no longer clear and its detection becomes problematic. A new algorithm for accurate and robust automatic triggering on soft breakdown (SBD) during constant voltage stress based on gate current noise increase is presented. Triggering on current spikes or pre-BD events is avoided. This test assures correct automatic SBD-detection in a wide range of stress conditions and various geometries, with an execution speed that provides acceptable time resolution.