Transition edge sensor array development

NIST is fabricating multi-pixel arrays of transition edge sensor (TES) microcalorimeter detectors for use in microanalysis and X-ray astrophysics. We have developed both room temperature digital feedback electronics and a successful SQUID multiplexing technology that will be applied to form a practical, expandable system. We are also exploring surface micromachining techniques to enable the fabrication of large-scale, close-packed arrays of TES microcalorimeters.