"Gated-diode" in SOI MOSFETs: a sensitive tool for characterizing the buried Si/SiO/sub 2/ interface

A "gated diode" technique is described for the measurement of the interface state density of the silicon film/buried oxide interface of SOI MOSFETs. This approach becomes possible by taking advantage of the front gate, which is biased to inversion (NMOSFET) or accumulation (BC-PMOSFET) during the measurement, while scanning the back interface through depletion. Using this technique the estimated value of the buried interface state density of typical low dose SIMOX MOSFETs was slightly over 10/sup 11//cm/sup 2/.