The Electrochemical Seismometer Based on a Novel Designed Sensing Electrode for Undersea Exploration

This paper developed a MEMS based electrochemical seismometer featured with a new structure of sensing electrodes. The sensing electrodes in this study can significantly increase the working areas of cathodes, and accurately control the geometries of the insulation layer. In comparison to previously reported counterparts, the proposed seismometer is featured with 1) simplification of the device fabrication process and 2) an increase in the device sensitivity. The devices performance was test by the vibration table and produced the sensitivity of 4100V/(m/s).