Design optimization and improved performance on the link beam driven, miniaturized scanning mirror device

Previously, we reported a silicon torsional resonant mirror driven by a PZT plate through link beam leverage effects and confirmed the device operation. Our device is mechanically reliable and stable since there are no metal leads on the vibrating silicon torsional beams and the mirror is supported by 6 beams. We present an improved device having much higher performance through both design and process optimization based on detailed FEM simulations and refinement of the fabrication process.