Optimized design of spiral inductors for Si RF IC's

Inductors are important elements of microwave circuits which frequently require high quality factors, small size and large inductance. Optimization design would be very useful for circuit simulation of RF circuits with on silicon chip spiral inductors. In this paper a method for the optimized design of silicon integrated circuit spiral inductors is discussed. In the method, a relatively complete circuit model is developed, the method used to create the model is in good agreement with experiment and 3D EM field simulation.