Design of Chirped Gratings using Interferometric Lithography

Interferometric lithography with curved wavefronts produces chirped gratings. The chirp can be longitudinal, with the periodicity changing along the grating wavevector, or transverse, with the periodicity changing in the perpendicular direction. The chirp is investigated for a range of configurations, and specific optical systems to generate a wide range of grating chirp parameters are analyzed.