Fabrication of monolithically integrated Mach-Zehnder asymmetric interferometer switch

We report a novel method of fabricating a compact, monolithically integrated AlInGaAs Mach-Zehnder asymmetric interferometer for use as a 40 Gbit/s demultiplexer. Instead of regrowth, the plasma process damage induced quantum well intermixing was used to modify the bandgap of passive waveguides.