Non-linear FEM simulation of the elasto-plastic behaviour in MEMS specimens

Main goal of the present paper is the experimental characterization of the elastic-plastic behavior of beam structure MEMS test specimen. For this purpose, a non-linear FE-based model is studied and results were successively benchmarked with experimental data obtained in laboratory. In this paper non-linear FEM simulation is uses to design and characterize a specimen embedded in the test MEMS structure.