A QCM Dew Point Sensor With Active Temperature Control Using Thermally Conductive Electrodes

A dew point (DP) sensor structure was proposed with active temperature control using the thermally conductive electrodes on the quartz crystal microbalance (QCM). Two copper wires were bonded on both sides of the QCM via the conductive adhesive as the main heat transfer components. The transmittal of the temperature and the fixation of sensitive cell were realized by the connection of electrode pins. Finite element analysis was carried out to theoretically validate the high-temperature transfer efficiency and good vibration characteristics of the structure with optimal dimensions. Gases with different DP were measured to evaluate the performance of the sensor. The accuracy of the DP sensor was found to be ±0.22 °C DP in the range of 5 °C DP ~16 °C DP by referencing to a commercial MICHELL S4000 DP meter.