Research on surge detection technology based on MEMS pressure sensor array

In this paper, the theoretical model of surge direction spectrum is established, and the technical scheme of detecting surge is determined by analyzing and calculating. An array based MEMS pressure sensor is used to detect the surge. This paper determines the MEMS pressure sensor surge action area deployment mode according to the theoretical model. We use the LABVIEW data acquisition card to collect all point value of the pressure sensor array value. Through the analysis and processing of the pressure value of the array, the pressure change trend of surge area is obtained. The experiment shows the design is reasonable and feasible, the precision of MEMS pressure sensor is 1cm, the full range is 0.5m, the direction of surge can be obtained by phase change, and the height of the surge can be measured by the amplitude of the pressure sensor.