Development of potentiometric miniature gas sensor arrays feasible for small olfactory chips and gas recognition from their response patterns

In this study, we propose a novel sensing device for small olfactory chips which can be installed on mobile such as smart phone. The device comprises gas-sensitive films deposited on surface potential sensor arrays, which is integrated in a single chip with the area of 7.3 mm
²
. The chip has 128 × 128 elements with the element size of 37.30 × 37.30 pm
²
. Three kinds of the gas-sensitive film were separately deposited on the sensor arrays. Different responses among these gas-sensitive films were obtained for ethanol, ammonia, and acetic acid, and these gases were successfully recognized from the response characteristics of each of these gas-sensitive films. These results indicate the promising property of the proposed device as a small olfaction chip.