Investigation of optical crosstalk in monolithically integrated photodetectors arrays for multichannel detection systems

The paper presents an investigation of optical crosstalk for monolithically integrated photodiodes arrays based on lateral collection of photogenerated carriers in the optical active layer of semiconductor substrate. The analysis gives the possibility to optimize the photodetectors structures in order to reduce the crosstalk in array independently of semiconductor substrate. Two types of photodiodes arrays were experimented on silicon with rectangular geometry of 200/200 /spl mu/m having a minimum crosstalk (/spl sim/10/sup -4/) for 0.9 /spl mu/m radiation wavelength.