Gold on chromium pressure sensing structures on polyimide membranes

This paper presents the manufacturing of a simple pressure sensing structure supported on polyimide membranes obtained by micromachining of a GaAs substrate. The sensing element is a gold on chromium resistor on the polymide membrane. The technological process for the manufacturing of this structure is presented. The variation of /spl Delta/R/R vs. pressure and /spl Delta/R/R vs. temperature as well as the sensitivity of the structure /spl Delta/W(R/spl Delta/p) vs. temperature are analysed The sensing element show high linearity, absence of hysteresis, and good sensitivity, and can be used in high temperature applications.