Vibrating Beam MEMS Seismometer for Footstep and Vehicle Detection

Miniature seismometers networks have been used recently to measure seismic waves emitted by footsteps or vehicles in order to protect restricted areas and detect and identify any intruder. Existing seismometers show whether limited range of detection or limited autonomy, this paper presents the development of a high resolution (100μg @ 500Hz), low power consumption (3.5 mW), and miniature (10 mm
²
MEMS) seismometer sensor node for unattended ground sensors network dedicated to intruder detection in a guarded area. It is based on a quartz MEMS vibrating beam seismometer that is presented, as well as the signal processing for target detection, localization, and identification, and finally experimental results are shown.