FEM-Simulation and Experimental Realization of Low-Cost Electrowetting Actuators for a Flexible Microfluidic Pixel

We investigate and characterize three different fabrication methods facilitating low-cost electrowetting-on-dielectric (EWOD) structures. EWOD allows setting fluid droplets in motion by electrically altering the surface tension equilibrium at the triple contact line. We present a fabrication method for flexible EWOD structures by screen printing a transparent and conducting poly (3, 4-ethylenedioxythiophene) polystyrene sulfonate (PDOT:PSS) polymer on polyethylene terephthalate (PET) foil. As a demonstrator for applications, i.e., a flexible microfluidic EWOD display cell is simulated using FEM and characterized in terms of feasibility and response speed for various pixel scaling. The accordingly fabricated microfluidic pixel serves as a basis cell for a bendable and flexible EWOD cell multigrid, where all pixels are directly addressable.