A novel dual-threshold MEMS acceleration latching switch

A MEMS acceleration latching switch has been developed through concept, analysis, design and prototype test in this paper. The switch has the sensitivity to both thresholds of acceleration amplitude and pulse width. Its mechanism of action lies on the mutual collision and friction of the mass and damping anchor when the switch is suffered from different acceleration loads. Typically, it keeps off-state when half-sine Load 1 with amplitude 15000g (g represents gravity acceleration)and duration 300μs is loaded, while it will turn to be on-state when half-sine Load 2 with amplitude 3000g and duration 3ms is loaded. The tooth profile and pairs on the mass and damping anchor play a key damping role on recognition capability. The switch applied these typical acceleration in sensitive direction is simulated by ANSYS. Prototype switches were prepared by UV-LIGA technology. Two experiments on prototype switch have been executed respectively. The one is based on a dropping hammer system and the other one is based on an air launcher system. The experimental results are matched well with simulation results.