Annular ultrasonic micromotors fabricated from bulk PZT

This paper reports a new class of bulk PZT traveling wave ultrasonic micromotor fabricated from a single sheet of bulk PZT. Actuation of electrode pairs in a differential quadrature configuration is enabled by use of transverse interdigitated electrodes to achieve bendingmode actuation of a stator ring, enabling a simple single-layer device design and enhancing the effective input voltage applied to the device. Using fabricated micromotor patterned by micro powder blasting, bi-directional rotary motion of 100 μm thick glass rotors is successfully demonstrated.